Section 1: Product Identification
Tetrakis(dimethylamino)hafnium, 98+% (99.99+%-Hf, <0.2%-Zr) TDMAH,PURATREM,72-8000,contained in
Chemical Name:
50ml Swagelok® cylinder (96-1070) for CVD/ALD
CAS Registry Number: 19962-11-9
Formula: Hf(N(CH3)2)4
EINECS Number: none
Chemical Family: metal amide complex
Synonym: none
Section 2: Composition and Information on Ingredients
Ingredient CAS Number Percent ACGIH (TWA) OSHA (PEL)
Title Compound 19962-11-9 100% no data no data
Section 3: Hazards Identification
Emergency Overview: Corrosive to eyes, skin and respiratory tract.
Primary Routes of Exposure: Ingestion, inhalation, skin, eyes
Eye Contact: Causes burns to the eyes
Skin Contact: Causes burns to the skin.
Inhalation: Causes burns to the nose, mucous membranes and respiratory tract.
Ingestion: No information on the physiological effects of ingestion.
Acute Health Affects: Corrosive to skin, eyes and respiratory tract.
Chronic Health Affects: No information available on long-term chronic effects.
NTP: No
IARC: No
OSHA: No
SECTION 4: First Aid Measures
Immediately flush the eyes with copious amounts of water for at least 10-15 minutes. A victim may need
Eye Exposure:
assistance in keeping their eye lids open. Get immediate medical attention.
Wash the affected area with water. Remove contaminated clothes if necessary. Seek medical assistance if
Skin Exposure:
irritation persists.
Remove the victim to fresh air. Closely monitor the victim for signs of respiratory problems, such as difficulty
Inhalation:
in breathing, coughing, wheezing, or pain. In such cases seek immediate medical assistance.
Seek medical attention immediately. Keep the victim calm. Give the victim water (only if conscious). Induce
Ingestion:
vomiting only if directed by medical personnel.
SECTION 5: Fire Fighting Measures
Flash Point: none
Autoignition Temperature: no data
Explosion Limits: no data
Extinguishing Medium: carbon dioxide, foam or dry powder
If this product is involved in a fire, fire fighters should be equipped with a NIOSH approved positive pressure
Special Fire Fighting Procedures:
self-contained breathing apparatus and full protective clothing.
Hazardous Combustion and If involved in a fire, this material may emit irritating organic fumes.
Decomposion Products:
Unusual Fire or Explosion Hazards: No unusual fire or explosion hazards.
SECTION 6: Accidental Release Measures
Spill and Leak Procedures: Small spills can be absorbed into vermiculite or other suitable adsorbent. Sweep up the solid and dispose of.
SECTION 7: Handling and Storage
Store cold, in freezer, in a tightly sealed container. Keep away from heat and direct sunlight. Handle and store
Handling and Storage:
under an inert atmosphere of nitrogen or argon.
SECTION 8: Exposure Controls and Personal Protection
Eye Protection: Always wear approved safety glasses when handling a chemical substance in the laboratory.
Skin Protection: Wear protective clothing and gloves.
Ventilation: Handle the material in an efficient fume hood.
If ventilation is not available a respirator should be worn. The use of respirators requires a Respirator
Respirator:
Protection Program to be in compliance with 29 CFR 1910.134.
Ventilation: Handle the material in an efficient fume hood.
Additional Protection: No additional protection required.
SECTION 9: Physical and Chemical Properties
Color and Form: colorless to pale yellow xtl
Molecular Weight: 354.79
Melting Point: 38-41°
Boiling Point: 85°C /0.1mm
Vapor Pressure: 0.1mm/60?
Specific Gravity: no data
Odor: slight amine odor
Solubility in Water: reacts violently with water
SECTION 10: Stability and Reactivity
Stability: moisture sensitive (store cold)
Hazardous Polymerization: no hazardous polymerization
Conditions to Avoid: contact with water
Incompatibility: strong oxidizing agents, water, halogens
Decomposition Products: Carbon dioxide, carbon monoxide, organic fumes and hafnium oxide.
SECTION 11: Toxicological Information
RTECS Data: No information available from the RTECS files.
Carcinogenic Effects: no data
Mutagenic Effects: no data
Tetratogenic Effects: no data
SECTION 12: Ecological Information
Ecological Information: No information available.
SECTION 13: Disposal Considerations
Disposal: Dispose of this material according to local, state and federal regulations.
SECTION 14: Transportation
Shipping Name (CFR): Water-reactive solid, Corrosive, N.O.S.
Hazard Class (CFR): 4.3
Additional Hazard Class (CFR): 8
Packaging Group (CFR): II
UN ID Number (CFR): UN# 3131
Shipping Name (IATA): Water-reactive solid, Corrosive, N.O.S.
Hazard Class (IATA): 4.3
Additional Hazard Class (IATA): 8
Packaging Group (IATA): II
UN ID Number (IATA): UN# 3131
SECTION 15: Regulatory Information
TSCA: Not listed in the TSCA inventory
SARA (Title 313): Not reportable under SARA Title 313.
Second Ingredient: none
SECTION 16 - ADDITIONAL INFORMATION
N/A
