三氟化氮

  • 基本信息
  • 制备方法及用途
  • 物化性质
  • 安全信息
  • 毒理性
  • MSDS
  • 结构与计算化学
  • 上游产品
  • 下游产品

三氟化氮 基本信息

中文名称:
三氟化氮 
中文别名:
三氟化氮;
氟化氮 
英文名称:
Nitrogen fluoride (NF3)
英文别名:
nitrogen trifluoride;
Trifluoroammonia;
Trifluoramine;
NF3;
nitrogen fluoride;
Nitrogen trifluoride;
Perfluoroammonia;
Trifluoroamine;
Trifluorammonia;
N,N,N-Trifluoroamine;
Stickstofftrifluorid 
CAS No.:
7783-54-2
分 子 式:

F3N

分 子 量:
71.01
精确分子量:
70.99830
PSA:
3.24000
EINECS:
232-007-1
InChI:
InChI=1/F3N/c1-4(2)3
危险品标志:

 

风险术语:

 

安全术语:

 

分子结构式:
SDS:
查看

三氟化氮 制备方法及用途

制备方法

在熔融氟铵酸存在下,采用氨直接氟化工艺,其反应式为:反应产物经过除雾器、淋洗器、分子筛吸附器,以及真空蒸馏,可分别除去各种杂质,最后用低温法收集得到NF3。

合成制备方法

在熔融氟铵酸存在下,采用氨直接氟化工艺,其反应式为:

反应产物经过除雾器、淋洗器、分子筛吸附器,以及真空蒸馏,可分别除去各种杂质,最后用低温法收集得到NF3

用途简介

NF3是微电子工业中一种优良的等离子蚀刻气体,对硅和氮化硅的蚀刻,采用NF3和CF4+O2的混合气体有更高的蚀刻速率和选择性,而且对表面无污染。氢与NF3反应,在瞬间伴随放出大量的热,这就是NF3在高能化学激光器方面大量应用的原理。在高温下,NF3与有机化合物反应常伴有爆炸性,操作时应十分谨慎。用作高能燃料。

用途

1.NF3是微电子工业中一种优良的等离子蚀刻气体,对硅和氮化硅的蚀刻,采用NF3和CF4+O2的混合气体有更高的蚀刻速率和选择性,而且对表面无污染。氢与NF3反应,在瞬间伴随放出大量的热,这就是NF3在高能化学激光器方面大量应用的原理。在高温下,NF3与有机化合物反应常伴有爆炸性,操作时应十分谨慎。

2.用作高能燃料。[17]

三氟化氮 物化性质

外观与性状:
无色气体
密度:
1.361 g/cm3
熔点:
-207°C
沸点:
-129°C
水溶解性:
insoluble
折射率:
1.187
存储条件/存储方法:
库房通风低温干燥,轻装轻卸,与氢气、还原剂、油脂分开存放
稳定性相关:

1.高纯NF3几乎没有气味,但商业用NF3由于有痕量活性氟,因而具有刺激性气味。临界温度气体。NF3是一种热力学稳定的氧化剂,大约在350℃时,它的反应活性相当于氧,在高温下,NF3能与许多元素反应生成N2F4和相应的氟化物。三氟化氮是一种毒物,其主要危害是由于呼吸道吸入而中毒。

2.稳定性[12]  稳定

3.禁配物[13]  还原剂、易燃或可燃物

4.避免接触的条件[14]  受热

5.聚合危害[15]  不聚合

其它信息:

1.性状:无色、带霉味的气体。[1]

2.熔点(ºC):-208.5[2]

3.沸点(ºC):-129[3]

4.相对密度(水=1):1.89(沸点,液体)[4]

5.相对蒸气密度(空气=1):2.45[5]

6.临界温度(ºC):-39.3[6]

7.临界压力(MPa):4.53[7]

8.溶解性:不溶于水。[8]

三氟化氮 安全信息

风险类别:
2.2
危险类别码:
R8
安全说明:
S17-S23-S38
安全标志:
S17:远离可燃物质。
S23:不要吸入蒸汽。
S38:在通风不良的场所,佩戴合适的呼吸装置。
危险标志:
O: Oxidizing agent;

三氟化氮 毒理性

CHEMICAL IDENTIFICATION

RTECS NUMBER :
QX1925000
CHEMICAL NAME :
Nitrogen trifluoride
CAS REGISTRY NUMBER :
7783-54-2
LAST UPDATED :
199712
DATA ITEMS CITED :
28
MOLECULAR FORMULA :
F3-N
MOLECULAR WEIGHT :
71.01
WISWESSER LINE NOTATION :
N F3

HEALTH HAZARD DATA

ACUTE TOXICITY DATA

TYPE OF TEST :
LC50 - Lethal concentration, 50 percent kill
ROUTE OF EXPOSURE :
Inhalation
SPECIES OBSERVED :
Rodent - rat
DOSE/DURATION :
6700 ppm/1H
TOXIC EFFECTS :
Lungs, Thorax, or Respiration - dyspnea Lungs, Thorax, or Respiration - cyanosis Lungs, Thorax, or Respiration - respiratory stimulation
REFERENCE :
TXAPA9 Toxicology and Applied Pharmacology. (Academic Press, Inc., 1 E. First St., Duluth, MN 55802) V.1- 1959- Volume(issue)/page/year: 26,1,1973
TYPE OF TEST :
LD50 - Lethal dose, 50 percent kill
ROUTE OF EXPOSURE :
Intraperitoneal
SPECIES OBSERVED :
Rodent - rat
DOSE/DURATION :
26 mg/kg
TOXIC EFFECTS :
Blood - methemoglobinemia-carboxyhemoglobin
REFERENCE :
TXAPA9 Toxicology and Applied Pharmacology. (Academic Press, Inc., 1 E. First St., Duluth, MN 55802) V.1- 1959- Volume(issue)/page/year: 17,585,1970
TYPE OF TEST :
LC50 - Lethal concentration, 50 percent kill
ROUTE OF EXPOSURE :
Inhalation
SPECIES OBSERVED :
Rodent - mouse
DOSE/DURATION :
2000 ppm/4H
TOXIC EFFECTS :
Details of toxic effects not reported other than lethal dose value
REFERENCE :
34ZIAG "Toxicology of Drugs and Chemicals," Deichmann, W.B., New York, Academic Press, Inc., 1969 Volume(issue)/page/year: -,427,1969
TYPE OF TEST :
LC50 - Lethal concentration, 50 percent kill
ROUTE OF EXPOSURE :
Inhalation
SPECIES OBSERVED :
Mammal - dog
DOSE/DURATION :
9600 ppm/1H
TOXIC EFFECTS :
Lungs, Thorax, or Respiration - cyanosis Blood - methemoglobinemia-carboxyhemoglobin
REFERENCE :
AMRL** Aerospace Medical Research Laboratory Report. (Aerospace Technical Div., Air Force Systems Command, Wright-Patterson Air Force Base, OH 45433) Volume(issue)/page/year: TR-69-84,1969
TYPE OF TEST :
LC50 - Lethal concentration, 50 percent kill
ROUTE OF EXPOSURE :
Inhalation
SPECIES OBSERVED :
Primate - monkey
DOSE/DURATION :
7500 ppm/1H
TOXIC EFFECTS :
Lungs, Thorax, or Respiration - cyanosis Blood - methemoglobinemia-carboxyhemoglobin
REFERENCE :
AMRL** Aerospace Medical Research Laboratory Report. (Aerospace Technical Div., Air Force Systems Command, Wright-Patterson Air Force Base, OH 45433) Volume(issue)/page/year: TR-69-84,1969 ** OTHER MULTIPLE DOSE TOXICITY DATA **
TYPE OF TEST :
TDLo - Lowest published toxic dose
ROUTE OF EXPOSURE :
Inhalation
SPECIES OBSERVED :
Rodent - rat
DOSE/DURATION :
100 ppm/7H/19W-I
TOXIC EFFECTS :
Liver - fatty liver degeneration Kidney, Ureter, Bladder - interstitial nephritis Blood - changes in spleen
REFERENCE :
TXAPA9 Toxicology and Applied Pharmacology. (Academic Press, Inc., 1 E. First St., Duluth, MN 55802) V.1- 1959- Volume(issue)/page/year: 4,770,1962
TYPE OF TEST :
TDLo - Lowest published toxic dose
ROUTE OF EXPOSURE :
Intraperitoneal
SPECIES OBSERVED :
Rodent - rabbit
DOSE/DURATION :
85 gm/kg/29D-I
REFERENCE :
TXAPA9 Toxicology and Applied Pharmacology. (Academic Press, Inc., 1 E. First St., Duluth, MN 55802) V.1- 1959- Volume(issue)/page/year: 4,770,1962 *** REVIEWS *** ACGIH TLV-TWA 29 mg/m3 (10 ppm) DTLVS* The Threshold Limit Values (TLVs) and Biological Exposure Indices (BEIs) booklet issues by American Conference of Governmental Industrial Hygienists (ACGIH), Cincinnati, OH, 1996 Volume(issue)/page/year: TLV/BEI,1997 *** U.S. STANDARDS AND REGULATIONS *** MSHA STANDARD-air:TWA 10 ppm (29 mg/m3) DTLVS* The Threshold Limit Values (TLVs) and Biological Exposure Indices (BEIs) booklet issues by American Conference of Governmental Industrial Hygienists (ACGIH), Cincinnati, OH, 1996 Volume(issue)/page/year: 3,187,1971 OSHA PEL (Gen Indu):8H TWA 10 ppm (29 mg/m3) CFRGBR Code of Federal Regulations. (U.S. Government Printing Office, Supt. of Documents, Washington, DC 20402) Volume(issue)/page/year: 29,1910.1000,1994 OSHA PEL (Construc):8H TWA 10 ppm (29 mg/m3) CFRGBR Code of Federal Regulations. (U.S. Government Printing Office, Supt. of Documents, Washington, DC 20402) Volume(issue)/page/year: 29,1926.55,1994 OSHA PEL (Shipyard):8H TWA 10 ppm (29 mg/m3) CFRGBR Code of Federal Regulations. (U.S. Government Printing Office, Supt. of Documents, Washington, DC 20402) Volume(issue)/page/year: 29,1915.1000,1993 OSHA PEL (Fed Cont):8H TWA 10 ppm (29 mg/m3) CFRGBR Code of Federal Regulations. (U.S. Government Printing Office, Supt. of Documents, Washington, DC 20402) Volume(issue)/page/year: 41,50-204.50,1994 *** OCCUPATIONAL EXPOSURE LIMITS *** OEL-AUSTRALIA:TWA 10 ppm (30 mg/m3) JAN 1993 OEL-BELGIUM:TWA 10 ppm (29 mg/m3) JAN 1993 OEL-DENMARK:TWA 10 ppm (29 mg/m3) JAN 1993 OEL-FINLAND:STEL 10 ppm (29 mg/m3) JAN 1993 OEL-FRANCE:TWA 10 ppm (30 mg/m3) JAN 1993 OEL-THE NETHERLANDS:TWA 10 ppm (29 mg/m3) JAN 1993 OEL-THE PHILIPPINES:TWA 10 ppm (29 mg/m3) JAN 1993 OEL-SWITZERLAND:TWA 10 ppm (30 mg/m3) JAN 1993 OEL-UNITED KINGDOM:TWA 10 ppm (30 mg/m3);STEL 15 ppm (45 mg/m3) JAN 1993 OEL IN BULGARIA, COLOMBIA, JORDAN, KOREA check ACGIH TLV OEL IN NEW ZEALAND, SINGAPORE, VIETNAM check ACGIH TLV *** NIOSH STANDARDS DEVELOPMENT AND SURVEILLANCE DATA *** NIOSH RECOMMENDED EXPOSURE LEVEL (REL) : NIOSH REL TO NITROGEN TRIFLUORIDE-air:10H TWA 10 ppm REFERENCE : NIOSH* National Institute for Occupational Safety and Health, U.S. Dept. of Health, Education, and Welfare, Reports and Memoranda. Volume(issue)/page/year: DHHS #92-100,1992 NIOSH OCCUPATIONAL EXPOSURE SURVEY DATA : NOHS - National Occupational Hazard Survey (1974) NOHS Hazard Code - 50885 No. of Facilities: 11 (estimated) No. of Industries: 1 No. of Occupations: 3 No. of Employees: 357 (estimated) NOES - National Occupational Exposure Survey (1983) NOES Hazard Code - 50885 No. of Facilities: 7 (estimated) No. of Industries: 1 No. of Occupations: 1 No. of Employees: 1096 (estimated) No. of Female Employees: 140 (estimated)
毒理学数据:

1.急性毒性[9]  LC50:19000mg/m3(大鼠吸入,1h);5600mg/m3(小鼠吸入,4h)

2.刺激性  暂无资料

3.亚急性与慢性毒性[10]  大鼠于308mg/m3浓度下,每天吸入7h,共4~5个月,见肝、肾有轻至中度病理改变,脾肿大,尿氟增高。

生态数据:

1.生态毒性  暂无资料

2.生物降解性  暂无资料

3.非生物降解性  暂无资料

4.其他有害作用[11]  室温气体,会造成全球气候变暖。

三氟化氮 MSDS

第一部分:化学品名称

三氟化氮 分子结构与计算化学数据

分子结构数据

1、摩尔折射率:6.26

2、摩尔体积(cm3/mol):52.1

3、等张比容(90.2K):86.3

4、表面张力(dyne/cm):7.5

5、极化率(10-24cm3):2.48

计算化学数据

1.疏水参数计算参考值(XlogP):1.9

2.氢键供体数量:0

3.氢键受体数量:4

4.可旋转化学键数量:0

5.互变异构体数量:无

6.拓扑分子极性表面积3.2

7.重原子数量:4

8.表面电荷:0

9.复杂度:8

10.同位素原子数量:0

11.确定原子立构中心数量:0

12.不确定原子立构中心数量:0

13.确定化学键立构中心数量:0

14.不确定化学键立构中心数量:0

15.共价键单元数量:1

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